How can I find out compile time of each step?

From

I know that there are basically 6 steps in compilation.
Invocation
Lexing
parsing
AST lowering
MIR lowering
Code generation

How can I find out compile time of each one?
Can I do them step by step?

I believe the section of the compiler dev guide on profiling describes what you are looking for:

Thank you.
I'll check it out.

Thank you again, and I'll appreciate if you could tell me where I can find the list of events/Items and each of them does?
And when I run
summarize summarize
there is no
Cache hits | Blocked time | Incremental load time
Do you know why?

I guess it is because there is nothing to show according to

And I made some change to my code, and compile it again.
I thought at least "Incremental load time" will show, but still nothing.

By the way, is the event/item here equivalent to query in rust compiler?